1. Home
  2. 제품안내
  3. 산업기계  /  AP Machine  /  Semiconductor&LCD
  4. Thermal Fresh

  Thermal Fresh

image thumb

Thermal Fresh

Thermal Fresh

제품설명

 
Thermal Fresh

  ADVANTAGES

Stable temp. and humidity Control with all fresh air is available.
Most suitable for semiconductor, LCD processing and stable thickness of coating, ect.

  1. Pure nickel heat exchanger makes high corrosion resistance and high cleanliness by lowering Cu ionization (Patent Pend.)
  2. High accuraccy control(±0.1℃/±1%) with all fresh air. ※Class 10cleanliness (Optional).
  3. Stable humidity control by Orion's original humidification control method (Patent)
  4. Compact and space saving (Patent)
  5. Remote temp. and humidity controller and operation unit are available (Optional).
  6. Two independent temp. and humidity control system is available (AP-1500FSK-AW)
APPLICATIONS
  1. Photo-Resist Coater
  2. LCD Product Line
  3. Thin-Film Production Process
Temp. and humidity control in the photoresolution process for semiconductor wafer. High accuracy temp. and humidity control in the LCD process.
◎
High accuracy temp. and humidity control in the new material production process.