Per Thermo

ADVANTAGES

1. Freon-Free (No Fluorocarbon)
2. Ultra Precise Control of Liquid Temperature 
   (Pure Water, Chemical Solution, etc.)
3. Available for Multiple Control of Up to 8 Module
4. Cascade Control and Auto-Tuning of PID

APPLICATIONS 
      Semiconductor, LCD, optical disk, biotechnology, etc.

1. Wafer resist liquid temp. control
2. Etching liquid temp. control
3. Optical disk coating liquid temp. control
4. LCD glass coating liquid temp. control
5. Wafer, glass base plate temp. control
   ※ Make indirect temperature control for chemical liquid temp. control.